LENK ARNO <br/><br/>
ELECTROMECHANICAL SYSTEMS IN MICROTECHNOLOGY AND MECHATRONICS 

 -  SPRINGER  2011 
 - 471 P 
<br/><br/><label>ISBN: </label>9783642108051 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.381 LEN