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| 100 | _aBECHTOLD T | ||
| 245 | 0 | _aFAST SIMULATION OF ELECTRO THERMAL MEMS | |
| 260 | _bSPRINGER | ||
| 260 | _c2007 | ||
| 300 | _a180 P | ||
| 365 | _b10683.27 | ||
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