| 000 | 00381nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 181012s9999 xx 000 0 und d | ||
| 020 | _a9783642182921 | ||
| 082 | _a621 ZHO | ||
| 100 | _aZHOU ZHAOYING | ||
| 245 | 0 | _aMICROSYSTEMS AND NANOTECHNOLOGY | |
| 260 | _bSPRINGER | ||
| 260 | _c2012 | ||
| 300 | _a1004 P | ||
| 365 | _b14394.60 | ||
| 650 | _aMECHANICAL | ||
| 942 | _cREF | ||
| 999 |
_c14768 _d14768 |
||