000 00410nam a2200169Ia 4500
008 181012s9999 xx 000 0 und d
020 _a9783642108051
082 _a621.381 LEN
100 _aLENK ARNO
245 0 _aELECTROMECHANICAL SYSTEMS IN MICROTECHNOLOGY AND MECHATRONICS
260 _bSPRINGER
260 _c2011
300 _a471 P
365 _b9447.37
650 _aELECTRONICS
942 _cREF
999 _c14832
_d14832