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020 | _a9783642108051 | ||
082 | _a621.381 LEN | ||
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245 | 0 | _aELECTROMECHANICAL SYSTEMS IN MICROTECHNOLOGY AND MECHATRONICS | |
260 | _bSPRINGER | ||
260 | _c2011 | ||
300 | _a471 P | ||
365 | _b9447.37 | ||
650 | _aELECTRONICS | ||
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