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020 _a9780824758240
082 _a621.00 ALL
100 _a"ALLEN, JAMES J"
245 0 _aMICRO ELECTRO MECHANICAL SYSTEM DESIGN
250 _a1ST
300 _a465 P
365 _b995
650 _aAPPLIED PHYSICS
942 _cBK
999 _c17596
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