000 | 00366nam a2200157Ia 4500 | ||
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008 | 181012s9999 xx 000 0 und d | ||
020 | _a9780824758240 | ||
082 | _a621.00 ALL | ||
100 | _a"ALLEN, JAMES J" | ||
245 | 0 | _aMICRO ELECTRO MECHANICAL SYSTEM DESIGN | |
250 | _a1ST | ||
300 | _a465 P | ||
365 | _b995 | ||
650 | _aAPPLIED PHYSICS | ||
942 | _cBK | ||
999 |
_c17596 _d17596 |