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| 100 | _aJACKSON MARK J | ||
| 245 | 0 | _aMICRO AND NANOMANUFACTURING | |
| 260 | _bSPRINGER | ||
| 260 | _c2007 | ||
| 300 | _a699 P | ||
| 365 | _b7006.59 | ||
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