| 000 | 00424nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 181012s9999 xx 000 0 und d | ||
| 020 | _a9781574446753 | ||
| 082 | _a621.38152 DOE | ||
| 100 | _aDOERING ROBERT | ||
| 245 | 0 | _aHAND BOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY | |
| 250 | _a2ND | ||
| 260 | _bCRC | ||
| 260 | _c2008 | ||
| 300 | _a35-20 P | ||
| 365 | _b7484.40 | ||
| 650 | _aELECTRONICS | ||
| 942 | _cREF | ||
| 999 |
_c21211 _d21211 |
||