000 00401nam a2200169Ia 4500
008 181012s9999 xx 000 0 und d
020 _a9781420059113
082 _a621.38152 PAI
100 _aPAIK UNGYU
245 0 _aNANOPARTICLE ENGINEERING FOR CHEMICAL MECHANICAL
260 _bCRC PRESS
260 _c2009
300 _a191 P
365 _b8801.10
650 _aELECTRONICS
942 _cREF
999 _c22364
_d22364