000 00374nam a2200169Ia 4500
008 181012s9999 xx 000 0 und d
020 _a9783527315505
082 _a670.42 HES
100 _aHESSEL VOLKER
245 0 _aMICRO-PROCESS ENGINEERING
260 _bWILEY
260 _c2009
300 _a493 P
365 _b11211.16
650 _aMECHANICAL
942 _cREF
999 _c28333
_d28333