| 000 | 00420nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210417s9999 xx 000 0 und d | ||
| 020 | _aS Saranya | ||
| 100 | _a11PHD1031 | ||
| 245 | 0 | _aMicrostructuring of Quartz Substrates using an Electrochemical Discharge Machining Process for Realizing MEMS Devices | |
| 260 | _c2011 | ||
| 700 | _aDr Ravi Shankar A | ||
| 700 | _asaranyasambathkumar87@gmail.com | ||
| 942 | _cTHESIS | ||
| 999 |
_c82160 _d82160 |
||