| 000 | 00449nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 181012s9999 xx 000 0 und d | ||
| 020 | _a9780195681444 | ||
| 082 | _a621.38152 CAM | ||
| 100 | _aCAMPBELL STEPHEN A | ||
| 245 | 4 | _aTHE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION | |
| 250 | _a2ND | ||
| 260 | _bOXFORD UNIVERSITY PRESS | ||
| 260 | _c2010 | ||
| 300 | _a603 P | ||
| 365 | _b450.00 | ||
| 650 | _aELECTRONICS | ||
| 942 | _cBK | ||
| 999 |
_c9699 _d9699 |
||